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INSPECT series

tallurgical microscope are widely used in semiconductor packages solder pads loop height FPD panels (LCM) wafer level CSPS and so on.
  • Description
  • Technical Parameter
Usage:
INSPECT series measuring metallurgical microscope are widely used in semiconductor packages, solder pads, loop height, FPD panels (LCM), wafer level CSPS and so on.
Features:

■ High-precision marble base, table and column to ensure high stability and rigidity
■ Marble table design, with precision V-shaped cross rail, ensure long-term use without deform, effectively guarantee high mechanical precision
■ High-quality optical system and high-resolution CCD ensure sharp image edges
■ Three-ring and eight-zone LED ring surface cold light source and contour light source, avoid the deformation of precision parts caused by the heat from light
■ Optional Nikon tilting trinocular tube + quintuple nosepiece
■ Independent research and development of image measuring software, powerful and easy to operate

  • Technical data:

    Model

    INSPECT300

    INSPECT400

    INSPECT500

    X、Y axis travel(mm)

    300*200

    400*300

    500*400

    Stage glass size(mm)

    357*257

    457*357

    557*457

    Z axis travel(mm)

    100

    X、Y、Z axis resolution (μm)

    1

    Length unit

    Linear scale

    Measuring accuracy (μm)

    2.5+L/150 L=measuring length (mm)

    Operation mode(X Y)

    Manual

    Operation mode(Z)

    CNC

    Image detection device

    High resolution CCD camera

    Quintuple nosepiece

    5X

    10X

    20X

    50X

    Eyepiece

    WF10X

    Measuring software

    2D measuring software

    Illumination

    Transmitted

    Epi-illumination system

    Contour

    LED parallel contour light

    Power supply

    AC100~240V 50/60Hz


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